SpecialitiesIntrusive frequencies minimised - low noise, low vibration,Dual mode - suitable for high throughput and high vacuum applications,Low mass (12.5 Kg) and compact size,Easy-to-use gas ballast Etc.
Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for direct pumping of low vacuum sputter coaters, such as the SC7620 and Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.