The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma EtcherAsherCleaner and use is essential if oxygen is to be used as a process gas. The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.

The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma EtcherAsherCleaner and use is essential if oxygen is to be used as a process gas. The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.