The system has been design to deposit rare materials like Platinum (Pt), Palladium (Pd), Rhodium (Rh), Gold (Au) and Silver (Ag) to produce highly efficient, uniform thin films for even the most complex applications. Comprehensive SCADA-based vacuum and process control automation provides repeatable run-to-run operation. Process recipe selection is provided and the system can send out SMS messages in the event of needing attention. A cryo-based pumping system enables an ultimate vacuum of < 5x 10-7 mbar in the chamber.