Listing ID #3952673
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Contact SupplierMemsstar’s Orbis dry release etch process tools are available using vapor Hydrogen Fluoride (HF) andXenon DiFluoride (XeF2) chemistries.
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Available in variants Alpha, 1000 and 3000.
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The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing.
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The ORBIS platform approach delivers many benefits to our customers, such as:
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1. Â Upgrade paths from R&D through to full-scale production
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2.  Cost-effective solutions—lab or fab
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3.  Seamless process transfer—from lab to fab
4. Â Low cost of ownership