Listing ID #7313025
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COMBINATORIAL PLASMA SPUTTERING COATER is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.Compared with similar equipment, it is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for laboratory research on solid electrolytes and OLEDs.
| Input Power | Single phase 220 VAC 50 / 60 Hz 2000 W (including vacuum pump and water chiller) |
|---|---|
| Source Power | Three sputtering power sources are integrated into one control box. DC source: 500 W power for coating metallic materials. RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials. |
| Magnetron Sputtering Head | Three 2″ Magnetron Sputtering Heads with water cooling jackets and shutters are included. One Sputting Head Model also available. Target size requirement: 2″ diameter Thickness range: 0.1 – 5 mm for both metallic and non-conductive targets (including backing plate) One Stainless Steel Target and one Research Grade Al2O3 target are included for demo testing Customized coater: Two DC – One RF; Two RF – One DC; Three DC; Three RF |
| Vacuum Chamber | Vacuum chamber: 300 mm Dia.×300 mm Height, made of stainless steel Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement Hinged type lid with pneumatic power pole allows easy target change |
| Sample Stage | Sample holder is a rotatable and heatable stage made of ceramic heater with copper cover Sample holder size: 140 mm Dia. for. 4″ wafer max Rotation speed: 1 – 20 rpm adjustable for uniform coating The holder temperature is adjustable from RT to 500 °C max (2h max) with accuracy +/- 1.0 °C via a digital temperature controller |
| Gas Flow Control | Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases Flow rate: 0 – 200 mL/min & 0 – 100ml/min adjustable on the touch screen control panel Air inlet valve is installed for vacuum release |
| Vacuum Pump Station | A mobile pump station is included. The sputtering coater can be placed on top of station High-speed turbo pump at speed 80L/S is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed Standard vacuum level connected with chamber : < 4.0E-5 Torr. . (1.0E-6 Torr with chamber baking ) |
| Water Chiller | One digital temperature controlled recirculating water chiller is included. Refrigeration range: 5~35 °C Flow rate: 16 L/min Pump pressure: 14 psi |
| Overall Dimensions | Lid closed: 48″ × 28″ × 32″ Lid open: 48″ × 28″ × 37″ |
Nano Science and Technology Company, founded by Mr Peeyush Dixit in 2013, has been a pioneer as a supplier and importer of multiple electronic and industrial uses chemicals in Gautam Buddha Nagar, Uttar Pradesh India. With a committed commitment to advantage and a customer-centric approach, we have established ourselves as a dependable name in both domestic and corporate sectors.
We recognize the importance of a clean and organized environment, be it at home or in the workplace. Our products are tailored to meet the exclusive requirements of each client, certifying the successful completion of all customer purposes. Whether it's Sputtering Systems, or Education and Research & Development areas, our team of skilled specialists is devoted to delivering top-notch results with efficiency and reliability.
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Vision: Our products must fulfill all the industrial requirements also, renowned for our commitment to excellence, innovation, and sustainability.
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Our service range
We are prominently providing reliable products like Muffle Furnaces, Vacuum Oven, Turbo Molecular Pump Station, Oxygen Plasma Cleaner, Lab Thin Film Coating System, Plasma Sputtering Coater, Thermal Evaporation Coater, Precision Temperature Controlled Hi-Vacuum Thermal Evaporating Coater etc.
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Why us?
Providing reliable and trustworthy products
Equipped with highly knowledgeable staff
Having multiple ranges of products
Transparent pricing structure
Providing online support as well
Nature of Business
Manufacturer / Exporter / Supplier
Number of Employees
20 - 50
Year of Establishment
2013
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