Metal Chemical Vapor Deposition system

Listing ID #4078119

Get Latest Price

Supply Type Manufacturer, Exporter, Supplier
Preferred Buyer Location All over the world

Valence Process Equipment offers both production and research-sized MOCVD reactor systems for Group III-Nitride and InGaAl-AsP material systems. We can provide a high degree of customization to suit....

View More Details

Send Enquiry

Product Details

Valence Process Equipment offers both production and research-sized MOCVD reactor systems for Group III-Nitride and InGaAl-AsP material systems. We can provide a high degree of customization to suit your specific process requirements.

Valence Process Equipment patented, 500-series platform features a non clogging, temperature-controlled showerhead gas injector, and our high symmetry, minimized-volume, non-recirculating pro led reactor, enabling production-level capacities with pilot-level gas and MO usage. Along with high speed wafer carrier rotation, rapid heating capability to 1200C, and high-velocity, uniform- fluid gaps providing efficient heat removal and uniform wall temperatures, the 500-series provides state-of-the-art epitaxial materials properties and uniformities at unbeatable efficiencies.

CAPACITY SPECIFICATIONS:
– 250- series capacity
– 10x2in, 5x3in, 3x4in, 1x6in, 1x8in
– 500-series capacity
– 72x2in, 20x4in, 7x6in, 4x8in

FACILITY SERVICES:
– 208 and 380 VAC, 3- Phase Power
– Purified N2, H2, and NH3 Gases
– Cooling Water Recirculation Loop
– Cabinet and Exhaust Ventilation

MATERIAL SPECIFICATIONS:
– GaN, InGAN, AIGaN, AIN
– 2 in., 3 in., 6 in., 8 in. Substrates
– Sapphire, Silicon, Silicon Carbide.

Company Details

Tesscorn was founded in 1993. The company has built its reputation as a leading supplier of top quality instrumentation for institutions in the Semiconductor, Solar and Nanotechnology manufacturing and research sectors. Over the years we have developed a network of suppliers, all leaders in their fields, providing unique manufacturing and research technologies across a broad spectrum of Semiconductor, Solar and Nanotechnology related applications. Our long-time and well established presence in these fields makes us a reliable technology partner and consultant. We pride ourselves on the valuable relationships we have developed with our research and industrial customers over many years.