Linear Motor Table is a direct- drive positioning table, consisting of a moving table and bed of aluminium alloy, in which an AC linear servo-motor and an optical linear scale are compactly integrated. It employs a C shaped magnet yoke, and a coil board is sandwhiched between two stator magnets. High thrust as well as high speed quick response positioning can thus be achieved. Linear motor series with minimun sectional height of 30 mm and high rigidity with long stroke of up to 2760 mm are prepared. Its is best suited for equipment and devices used in semi conductor and liquid crystal industry, and also for measuring instruments , assemblers, material transfer machines and other applications where high speed operations is required.

Linear Motor Table is a direct- drive positioning table, consisting of a moving table and bed of aluminium alloy, in which an AC linear servo-motor and an optical linear scale are compactly integrated. It employs a C shaped magnet yoke, and a coil board is sandwhiched between two stator magnets. High thrust as well as high speed quick response positioning can thus be achieved. Linear motor series with minimun sectional height of 30 mm and high rigidity with long stroke of up to 2760 mm are prepared. Its is best suited for equipment and devices used in semi conductor and liquid crystal industry, and also for measuring instruments , assemblers, material transfer machines and other applications where high speed operations is required.