Flow Measurement

Mks family of mass flow controller instruments measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing.
Mass flow controllers (mfcs) and mass flow meters (mfms) from mks instruments are available with either analog or digital communication, and with elastomer or metal seals. Analog mass flow controllers and mass flow meters are ideal for basic applications, offering high performance in a simple and cost effective package. Digital mass flow controller and mass flow meter devices offer several advantages over analog mass flow controllers and mass flow meters � improved diagnostic capabilities, multi-gas capability in a single package and multi-range capability for reduced spares requirement and overall lower cost of ownership.