FEATURES

• Pump range is available in nominal sizes from DN100 to DN1250
• HSR design reduces cool-down times
• Higher cooling power, Higher capacity and superior performance on second stage
• Optimized design enables operation in process temperatures up to 3500◦C and high gas loads in the same time
• Low vibration cooling system
• Closed-circuit operation (No need for continuous gas supply)
• Patented geometry ensures outstanding up-times and short regeneration times
• Highest manufacturing quality

Applications

HSR Cryo-pumps are high vacuum pumps, renowned for providing clean and outstanding vacuum in a very reliable manner. They find extensive use in:

• Thin-film coating systems
• Space Simulation chambers
• Sputter equipment
• Fusion test systems
• Particle accelerators
• Thermal coating systems
• Metallizing equipment

FEATURES

• Pump range is available in nominal sizes from DN100 to DN1250
• HSR design reduces cool-down times
• Higher cooling power, Higher capacity and superior performance on second stage
• Optimized design enables operation in process temperatures up to 3500◦C and high gas loads in the same time
• Low vibration cooling system
• Closed-circuit operation (No need for continuous gas supply)
• Patented geometry ensures outstanding up-times and short regeneration times
• Highest manufacturing quality

Applications

HSR Cryo-pumps are high vacuum pumps, renowned for providing clean and outstanding vacuum in a very reliable manner. They find extensive use in:

• Thin-film coating systems
• Space Simulation chambers
• Sputter equipment
• Fusion test systems
• Particle accelerators
• Thermal coating systems
• Metallizing equipment