Dry Vacuum Pumps

Hanbell PS Series vacuum dry pump which has gear transmission is equipped with coupling rotors, so the clearance between rotors can be minimum and the pump can be operated with out extra lubrication in the chamber; therefore, it's a oil free design compare with other similar products. With the patented screw rotor profile, the sealing effect between rotors is excellent and the ultimate working pressure can reach 7.5 x 10-3 Torr。Because the discharge route of our design is shorter compare with other products, it can have better effect on removing dusts. Besides that all rotors have the special coating on them, so our vacuum pump can be used in some production process such as PECVD and Etching.