Diffusion Furnaces

Diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.

Furnace Cabinet:

• Unitized structural steel assembly
• Hinged, locking and removable element access doors
• Thermally insulated enclosure paneling
• High temperature Urethane coating
• Easy-to-adjust element alignment supports
• Cabinet overtemperature interlock sensor
• Leveling pads and optional seismic brackets

Toxic Gas Scavenger:

• Stainless steel construction
• Vents gases and heat from process tube or chamber
• Indepently adjustable exhaust draw per tube-level
• Cantilever closure or manual door sealing per tube-level
• LPCVD flange and gas line fitting mounting scheme
• Differential pressure gauge to monitor exhaust draw

Air-to-water Heat Exchanger:

• Used to vent heated air from furnace cabinet top
• HVAC control of furnace room
• Water-cooled, high efficiency radiator
• Air baffle paneling to direct air flow through cabinet
• Exhaust fan module for air exhaust draw

Power Distribution:

• Located within base of furnace cabinet
• Encloses transformers, terminals and wire bussing
• Encloses temperature controls and contactors/breakers

• Easy accessibility to components
• Pull down panels for easy access to control modules
• EMO safety controls
• Reduncant overtemperature interlock per element zone

Element Kits:

• Elements

        Low temperature range element 350 to 900^oC    

        Mid temperature range element 600 to 1200^oC

        High temperature range element 600 to 1350^oC 

        +/- 0.5^oC tolerance 600 to 1350^oC range

        +/- 1.0^oC tolerance 350 to 600^oC range    

        Vacuum formed high purity alumina insulation

        Stainless steel shroud

        Helical windings with captive spacing

• Control and overtemperature TC spikes per zone
• TC wire channel
• TC holding and alignment clips
• Energy Kits

        High purity alumina vestibule blocks

        NEXTEL soft collars

        Stainless steel capture rings, plates and collars                   

Power Controls:

• High efficiency digital SSR/SCR firing circuitry
• Power control and circuit protection with EMO
• NEC-grade wiring
• Easy accessibility to components

• Main and control power disconnect contactors
• Individual element power contactors and resets
• Illuminated power indicators
• Redundant overtemperature interlocks
• 208, 380, 415, 480VAC main power, 50 or 60Hz