CVD CVI Vacuum Furnace

Carbon fibre reinforced composites with a matrix of carbon or silicon carbide have excellent characteristics such as low density, high strength and toughness, as well as ablation resistance at high temperature. These properties are suitable for applications such as thermal protection components in aircraft, rockets and the semiconductor industry.
To make such composites, a state-of-the-art furnace for Chemical Vapour Deposition Infiltration . This vertical, multi- layer vacuum coating furnace is meant to deposit silicon carbide coating on the substrate using methyl-try-chloro-silane as reactant and hydrogen as a carrying agent under suitable temperature and pressure. With minimum modifications, this CVDCVI vacuum furnace can also be used to deposit a wide range of materials such as boron nitride, hafnium carbide, tantalum carbide , silicon nitride and silicon dioxide .