Cryogenic Vacuum pumps are high vacuum pumps which achieve said vacuum by entrapping gaseous substances on cold surfaces (cryo-panels). HSR AG’s cryogenic pumps are, amongst other things, known for their impeccable performance data and reliability in use. Long operating periods between necessary maintenance breaks provide for high availability as well as seamless and cost effective operation.

• Pump range is available in nominal sizes from DN100 to DN1250
• HSR design reduces cool-down times
• Higher cooling power, Higher capacity and superior performance on second stage
• Optimized design enables operation in process temperatures up to 3500◦C and high gas loads in the same time
• Low vibration cooling system
• Closed-circuit operation (No need for continuous gas supply)
• Patented geometry ensures outstanding up-times and short regeneration times
• Highest manufacturing quality

HSR Cryo-pumps are high vacuum pumps, renowned for providing clean and outstanding vacuum in a very reliable manner. They find extensive use in:

• Thin-film coating systems
• Space Simulation chambers
• Sputter equipment
• Fusion test systems
• Particle accelerators
• Thermal coating systems
• Metallizing equipment

Cryogenic Vacuum pumps are high vacuum pumps which achieve said vacuum by entrapping gaseous substances on cold surfaces (cryo-panels). HSR AG’s cryogenic pumps are, amongst other things, known for their impeccable performance data and reliability in use. Long operating periods between necessary maintenance breaks provide for high availability as well as seamless and cost effective operation.

• Pump range is available in nominal sizes from DN100 to DN1250
• HSR design reduces cool-down times
• Higher cooling power, Higher capacity and superior performance on second stage
• Optimized design enables operation in process temperatures up to 3500◦C and high gas loads in the same time
• Low vibration cooling system
• Closed-circuit operation (No need for continuous gas supply)
• Patented geometry ensures outstanding up-times and short regeneration times
• Highest manufacturing quality

HSR Cryo-pumps are high vacuum pumps, renowned for providing clean and outstanding vacuum in a very reliable manner. They find extensive use in:

• Thin-film coating systems
• Space Simulation chambers
• Sputter equipment
• Fusion test systems
• Particle accelerators
• Thermal coating systems
• Metallizing equipment