Atomic Force Microscope measures the roughness of a sample surface at a high resolution, and performs microfabrication of a sample. Also provides 3D information from simultaneous Scanning Electron Microscopy and AFM pictures.

The SuperFlat AFM combines the power of SEM and AFM. Information on lateral dimensions and material from in-situ inspection can be complemented by precise AFM topographical and frictional information. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
Compatible with most of the Scanning Electron Microscopes and FIBs available in the market such as,
Carl Zeiss, FEI, Tescan, Jeol, Hitachi, Olympus, etc.

Atomic Force Microscope measures the roughness of a sample surface at a high resolution, and performs microfabrication of a sample. Also provides 3D information from simultaneous Scanning Electron Microscopy and AFM pictures.

The SuperFlat AFM combines the power of SEM and AFM. Information on lateral dimensions and material from in-situ inspection can be complemented by precise AFM topographical and frictional information. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
Compatible with most of the Scanning Electron Microscopes and FIBs available in the market such as,
Carl Zeiss, FEI, Tescan, Jeol, Hitachi, Olympus, etc.