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Separators & Strainers #30696

STACIS Active Piezoelectric Vibration Cancellation Systems

This type of system is primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.
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STACIS Integrated Active Piezoelectric Vibration Cancellation Systems

TMC has continually expanded its STACIS product line to solve specific vibration problems caused by ambient building floor vibrations present in semiconductor manufacturing and other precision processes.
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Electo-Damp Active Vibration Isolation Systems

Electro-Damp is the first commercial active vibration cancellation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. It can be configured as individual modules, designed into a TMC-manufactured frame, or as part of a complex sub-system.
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