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2 Products availableDomestic Fans, AC & Coolers
2 Products availableWe offer a complete product range of Diaphragm Valve for Ultra High Purity, Diaphragm Valve for General Applications AK, Diaphragm Valve for Ultra High Purity AZ, High Rigidity Slider Type and Self seal Fittings KC
TYPE :SV8, TE6
POWER SUPPLY: 85V-265V AC, other option M
INPUT: Ma , V, mv&RTDselected by Software
SUPPLY : 24V DC @ 30 Ma 12 V DC@60 Ma
OUTPUT: 2 Relay outputs & other options
ACCURACY : 0.25% F.S.+ 1Digit
DISPLAY : 4Digit dual display
Make : Nivelco Made in Germany/ Aquapra Make
Material : Pvc Or Neoprene
Contact Type: No& Nc
Cable Length: 5 Mtr &10 Mtr
Make: Rexroth
Model: R9830322 , AZ PW 21 004 RQR XX MB
Suction delivery: flange mounting
Multi-Channel
Four sensors can be connected.Applicable sensors: PSE53, 54, 56Capable of controlling various different applications from one controller4 inputs, 5 outputs
For UHP gas delivery in semiconductor and other clean industries.Used as gas shutoff valve.No spring is used for the wetted parts and drive part is also separatedfrom the diaphragm. Dead space in the flow path is small to suppressthe particle generation.
SUMMARY Fluid back-flow is prevented by back pressure.Unique design with only one moving part in the gas stream, an O-ring.Springless structure suppresses particle generation by vibration orchattering or pressure fluctuation on downstream side. [Vacuum generator]Vacuum generation equipment.Applicable to emission of unnecessary gas remaining inside thepiping during gas cylinder replacement. [Flow switch]Detects excess flow above a given flow rate, caused by pipe breakage, etc. |
Series
Type |
Body material |
Connection type |
Connection size |
|
AP |
Check valve |
316L SS secondary remelt |
Face seal |
1/4'', 3/8'' |
AP |
Vacuum generator |
316L SS |
Face seal |
1/4'', 3/8'' |
AP |
Flow switch |
316L SS secondary remelt |
Face seal |
1/2'', 3/4'' |
Rc, R and NPT connections are added to series.For wide variety of applications from semiconductor to general.Cleaned for O2serviceCompact and lightweight by making the actuator shorter (AK3542/4542)M5 actuation port (AK3542/4542)Compact and lightweight by modifying the knob design (AK3652/4652)The knob is a unique design that combines a scalloped round knob with a raisedrectangular section to provide two choices of gripping.(AK3652/4652).
Series
Type |
Body material |
Connection type |
Connection size |
|
AK |
Air operated |
316 SS |
Compression |
1/4'',3/8'' |
AK |
Manual |
316 SS |
Compression |
1/4'',3/8'' |
Cleanroom assembled and He leaked tested.Valve meets dimensional requirements of SEMI F36-0299, Option I.User-friendly forged body.
Series
Type |
Body material |
Connection type |
Connection size |
|
AZ |
Air operated |
316L SS |
Face seal |
1/4'' |
AZ |
Manual |
316L SS |
Face seal |
1/4'' |
A support guide is designed to support work pieces with significantoverhang.Easy installation with the same outer dimensions as Series LEF body, contributes to reductions in man-hour for design and assemblyStandardly equipped sealing band prevents the scattering of grease andentry of foreign matter from outside.
Description
Type |
Stroke |
Rated load (N) |
Rated load (N) |
|
Ball screw drive |
LEFG16-S |
50 to 500 |
6250 |
8350 |
Ball screw drive |
LEFG25-S |
50 to 600 |
8950 |
13900 |
Ball screw drive |
LEFG32-S |
50 to 800 |
16500 |
22000 |
Ball screw drive |
LEFG40-S |
150 to 1000 |
22700 |
34500 |
Belt drive |
LEFG16-BT |
300 to 1000 |
6250 |
8350 |
Belt drive |
LEFG25-BT |
300 to 2000 |
8950 |
13900 |
Belt drive |
LEFG32-BT |
300 to 2000 |
16500 |
22000 |
Belt drive |
LEFG25-BS |
300 to 2000 |
6250 |
8350 |
Belt drive |
LEFG32-BS |
300 to 2500 |
8950 |
13900 |
Belt drive |
LEFG40-BS |
300 to 3000 |
16500 |
22000 |
Max. stroke: 3000 mmMax. speed: 3000 mm/sMax. acceleration/deceleration: 20000 mm/S2Compatible drivers: LECSA LECSB LECSCL ECSS
Spec. Model Stroke(mm) Work load (kg)Horizontal Speed(mm/s) Screw lead(mm)AC servo motorLEJB40200 to 2000MAX.20MAX.200027AC servo motorLEJB63300 to 3000MAX.30MAX.300042
One-touch installation and removal.Built-in self-seal mechanism.Air does not exhaust after removal of tubing.Copper-free (Electroless nickel plated)
Compact size without taking up space.
Easy installment just by putting tube reel.
Vacuum 1.3 x 102 kPa applicablePiping can be done without removing nut.Fluid temperature: 5 to 150C (Brass sleeve) 5 to 60C (Resin sleeve)Steam can be used.Grease-free
Movable scale cylinder
Series | Action | Bore sizemm | Applicable counter |
CEP1 | Double acting | 1220 | CEU5/CEU1 |
Pin Clamp Cylinder - Series CKU, Pin Shift Cylinder - Series CKQR, Plate Clamp Cylinder - SeriesM(D)UKA, Clamp Cylinder - CKGV, Pin Shift Cylinder - CKZP
Integration of the compact guide cylinder (Series MGP) and a manualturntable.High precision bearings for smooth turning return movementTable unit has positioning mechanisms for each 90 and 180 ofrotation.
Type
Bearing |
Series |
Action |
Bore size (mm) |
|
Standard |
Slide bearing |
MGTM |
Double acting |
63,80,100 |
Standard |
Ball bushing |
MGTL |
Double acting |
63,80,100 |
Reduced in height: 10% reduction (27 mm: Existing model 30 mm)Product weight: 22% reduction (298 g: Existing model 380 g)Allowable kinetic energy: 64% improvement (0.09 J: Existing model0.055 J)
Type
Series |
Action |
Bore size (mm) |
|
Double ported type |
MXQ□A |
Double acting |
6,8,12,16,20,25 |
Low thrust with |
MXQ□B |
Double acting |
6,8,12,16,20 |
Single side ported type |
MXQ□C |
Double acting |
8,12 |
Height interchangeable type |
MXQ |
Double acting |
6,8,12,16,20,25 |
・Automatic adjustment to the most appropriate absorption performance
Type |
Series |
Absorbed energy(J) |
Absorption stroke(mm) |
O.D. thread |
Standard |
RB |
0.5~147 |
4~25 |
M6~M27 |
Coolant resistant |
RBL |
3.92~147 |
6~25 |
M10~M27 |
Short |
RBQ |
1.96~49 |
4~13 |
M16~M32 |
Can cool high temperature compressed air from compressors down to40C or less and efficiently remove moisture from the air.Stable operation is possible even in an environment with a hightemperature, high moisture and heavy foreign particles for this watercooled type.
Series
Applicable compressor |
Air flow capacity L/min (ANR) |
|
HAW |
2.2 to 110kW |
300 to 18000 |
Easy maintenance.-Possible to maintain easily without removing pipes.No need for electric power and no waste of air.Float style drain allows automatic draining without electric power.
Series
Port size |
Auto drain |
|
ADH4000 |
1/2 |
Float type |
Material: New PFA4-layer seal constructionReducer enables tube size changeability with no change of body required.
No programmingCapable of setting up an electric actuator operationwithout using a PC or teaching boxSpeed/acceleration 16-level adjustmentCompatible with actuators with locksSetting 3-level pushing force
Type
Series |
Compatible |
Power |
Parallel |
Parallel |
Number |
|
Programless |
LECP1 |
Step motor |
24 VDC |
6 |
6 |
14 points |
Clean Series LEFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC)
Max. work load: 60 kgPositioning repeatability: 0.02 mmCompatible controllers: LECP6 LECA6 LECP1 LECPA LECPMJ
|
Model |
Stroke |
Work load (kg) |
Speed |
Screw |
Step motor |
11-LEFS16 |
50 to 500 |
MAX.14 |
MAX.500 |
5,10 |
Step motor |
11-LEFS25 |
50 to 600 |
MAX.25 |
MAX.500 |
6,12 |
Step motor |
11-LEFS32 |
50 to 800 |
MAX.45 |
MAX.500 |
8,16 |
Step motor |
11-LEFS40 |
150 to 1000 |
MAX.55 |
MAX.500 |
10,20 |
Servo motor |
11-LEFS16A |
50 to 500 |
MAX.10 |
MAX.500 |
5,10 |
Servo motor |
11-LEFS25A |
50 to 600 |
MAX.18 |
MAX.500 |
6,12 |
AC servo motor |
11-LEFS25S |
50 to 600 |
MAX.20 |
MAX.900 |
6,12 |
AC servo motor |
11-LEFS32S |
50 to 800 |
MAX.45 |
MAX.1000 |
8,16 |
AC servo motor |
11-LEFS40S |
150 to 1000 |
MAX.60 |
MAX.1000 |
10,2 |
Max. operating pressure: 1.0 MPa (at 20)
Series
Tubing O.D. |
Tubing O.D. |
Color |
Fluid |
|
TS/TISA |
φ4,φ6,φ8,φ10 |
φ1/8''3/16''1/4'' |
Black, White, Red, Blue, Yellow, Green |
Air, Water |
For use where weld spatter is generated./Flame resistant (Equivalent toUL-94 Standard V-0)
High heat transfer coefficientHigh heat conductivityCompact design requiring less installation space.1/2 to 1/5 the size of conventional oil coolers.High heat transfer coefficient through the effects of turbulence.Minimal pressure drop.
Series
Heat transfer area |
Heat exchange |
Flow rate L/min |
Flow rate L/min |
|
HOW |
0.084 to 0.75 |
6 to 52 |
20 to 400 |
25 to 100 |
Magnetic separators protect machinery from malfunctions, reducedprecision, and burnout by adsorbing and eliminating contaminantsin the fluid by means of magnetism. This helps extend the servicelife of hydraulic equipment.
Series
Applicable fluid storage |
Flow speed |
Fluid |
|
FHM |
20 to 200 |
3 m/min or less |
FHMN : Petroleum, Water glycol, |
Series
Heat transfer area |
Heat exchange |
Flow rate L/min |
Flow rate L/min |
|
HOWF |
0.077 to 1.28 |
5.2 to 73 |
20 to 800 |
40 to 125 |
Lightweight, compact aluminum bodyPossible to mount auto switches.Same longitudinal dimensions for cylinders with/without auto switches.With auto switch (Series CHDQ : CHDQ, CHDQW)
Series
Nominal pressure (MPa) |
Body material |
Operation |
Tube bore size (mm) |
|
CHQ |
3.5 |
Aluminum |
Double acting single rod |
20, 32, 40, 50 |
CHQW |
3.5 |
Aluminum |
Double acting double rod |
20, 32, 40, 50 |
Prevents collected dust from falling into the tank.No need to replace flushing oil.Easy maintenance and no air mixing.Integrates a lubrication port strainer, suction filter, and air breather.Possible to detect clogging with the differential pressure indicator anddifferential pressure indication switch (CB-H).
Series
Port size |
Flow range L/min |
Operating |
Element μm |
|
FHG |
1/2B to 3B |
18 to 450 |
Negative pressure |
Micromesh : |
SUMMARYIdeal for medium flow filtration (Max. 230 L/min).Easy element replacement for V-band type(With cover anti-scattering mechanism) |
Series
Port size |
Max. operating pressure |
Operating temperature (℃) |
|
FGE |
R1, 2 |
0.7MPa |
MAX.80 |
Ideal for low flow filtration (Max. 60 L/min).Possible to select the antistatic specification (FGDE, FGDF).
Series
Port size |
Max. operating pressure |
Operating temperature (℃) |
|
FGD |
Rc3/8 1/2 3/4 |
0.7, 1MPa |
MAX.80 |
Stepless control of air pressure in proportion to electric signalsSensitivity: 0.2 kPa (100 kPa specification)Linearity: 1% or less (F.S.)Hysteresis: 0.5% or less (F.S.)Communication: CC-Link, DeviceNetTM, PROFIBUS DP, RS-232C.
Series
Port size |
Set pressure (MPa) |
|
ITV0000 |
Built-in One-touch fitting |
0.001 to 0.1 |
ITV1000 |
1/8,1/4 |
0.005 to 0.1 |
ITV2000 |
1/4,3/8 |
0.005 to 0.1 |
ITV3000 |
1/4,3/8,1/2 |
0.005 to 0.1 |
SUMMARY Wetted partsBody: New PFA Diaphragm: PTFERecommended maximum flow rate: 20 L/min (SRF50)(0.3 MPa at inlet pressure, Fluid: Water) |
Easy replacement of the elementThe element and the bowl are in one piece. Replacement can be done in hand.Energy saving regulatorPressure drop: Max. 50% improvementReduced required maintenance space: Max. 46% reductionBetter visibility & saferThe bowl is covered with a transparent bowl guard.AttachmentSpacer : Y200-A, Y300-A, Y400-A, Y500-ASpacer with bracket : Y200T-A, Y300T-A, Y400T-A,
Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG K
Improves visibility of pressure gauges located in various locations.
Series |
Port size |
Set pressure (MPa) |
Filtration (μm) |
AWG20K to 40K |
1/8,1/4,3/8,1/2 |
0.05 to 0.85 |
5 |
Type
Series |
Port size in |
Applicable tubing O.D. |
Applicable tubing O.D. |
|
With One-touch fittings |
AS□□□1F-D |
M5 to 1/2 |
φ3.2 to φ12 |
φ1/8'' to φ1/2'' |
With One-touch fittings |
AS□□□1F-D |
− |
φ3.2 to φ12 |
φ1/8'' to φ1/2'' |
With One-touch fittings |
ASD□□□F-D |
M5 to 1/2 |
φ3.2 to φ12 |
φ1/8'' to φ1/2'' |
Metal body |
AS□2□0-D |
M5 to 1/2 |
φ3.2 to φ12 |
φ1/8'' to φ1/2'' |
Available with a limit indicator and color zones. Series G15, G27, G36, GA36, G46, GA46, G33, GA33, G43, G36-L, G46-L
Series
Size (O.D.) |
Connection thread |
|
G15 |
φ15 |
R1/8, M5(Female thread) |
G27 |
φ27 |
R1/8, 1/16 |
G36 |
φ37.5 |
R1/8, M5(Female thread) |
GA36 |
φ37.5 |
R1/8 |
G46 |
φ42.5 |
R1/8, 1/4, M5(Female thread) |
GA46 |
φ42.5 |
R1/8, 1/4 |
G33 |
φ30 |
R1/8 |
GA33 |
φ30 |
R1/8 |
G43 |
φ43 |
R1/8, 1/4 |
G36-L |
φ37.5 |
R1/8 |
G46-L |
φ42.5 |
R1/8,1/4 |
Type
Series |
Port size |
Applicable tubing O.D. |
Applicable tubing O.D. |
|
In-line type |
AK2000/AK4000 |
1/8 to 1 |
- |
- |
Straight type |
AKH |
- |
φ4 to φ12 |
φ5/32'' to φ1/2'' |
Male connector type |
AKH |
M5 to 1/2 |
φ4 to φ12 |
φ5/32'' to φ1/2'' |
Bushing type |
AKB |
1/8 to 1/2 |
- |
- |
Made to Order |
・Body material: Brass, Stainless steel ・Rubber material: NBR, FKM, CR ・High temperature, low temperature ・Low cracking |
1/8 to 1/2 |
- |
- |
Oil-free, external parts copper-freeWith limit indicator
Series |
Size (O.D.) |
Connection thread |
G46E |
φ42.5 |
R1/8,1/4 |
The lock-up valve is used if any air source or air supply piping linefailure occurs in the air operated process control line.Single acting, Double acting: retains pressure at the operating areaas emergency operation until the air source is recovered to its normal state.3 Port: Changes the supply port if a trouble occurs.
Series
port size |
set pressure (MPa) |
Shut-off pneumatic circuit pressure |
|
IL.211.220 |
Rc1/4 |
0.14 to 0.7 |
0.7MPa |
Stainless Steel 316 and Special TemperatureEnvironment (40) SpecificationsExternal parts material: Stainless steel 316Ambient and fluid temperature: 40 to 80NACE International Standards compliant
SeriesPort sizeSet pressure (MPa)Nominal filtration rating (m)
AW30/40-X26221/43/81/20.05 to 0.855
The air pressure in proportion to the current signal can be output.Wide output pressure range/0.02 to 0.6 MPaFast responseIndependent electric unit/Explosion-proof (flameproof) constructionEasy span adjustment
Series
Port size |
Supply air pressure (MPa) |
Input current |
|
IT600 |
Rc1/4 |
0.14 to 0.24 |
4 to 20mA DC |
IT601 |
Rc1/4 |
0.24 to 0.7 |
4 to 20mA DC |
Used when the piping distance between instrumentation andoperational area is long, or when operational area has large capacity.Can help accelerate actuation speed considerably.
Series
Port size |
Input/Output |
Input/Output pressure |
|
IL100 |
Rc1/4, 3/8 |
1:1 |
0.7MPa |
XT240 |
Rc. NPT 1/4 (IN), 1 (SUP. OUT) |
1:1 |
0.7MPa |
Can be integrated with ZX or ZR ejector system.Suction filter comes as standard.
Series
Type |
Set pressure range |
|
ZSE2 |
Vacuum pressure |
0 to -101kPa |
ISE2L |
Positive pressure |
0 to 100kPa |
ISE2 |
Positive pressure |
0 to 1MPa |
For UHP gas delivery in semiconductor and other clean industries.Body material: 316L SS secondary remelt or 316L SSElectropolished wetted partsMetal seal to atmosphere.
Series
Actuation |
Application |
Body material |
Connection type |
Connection size |
|
AP/SL |
Single stage |
Distribution (Compact) |
316L SS |
Face seal |
1/4'', 3/8'' |
AP/SL |
Single stage |
Distribution |
316L SS |
Face seal |
1/4'', 3/8'' |
AP/SL |
Single stage |
Bulk gas |
316L SS |
Face seal |
1/2'', 3/4'', 1'' |
AP/SL |
Single stage |
Source |
316L SS |
Face seal |
1/4'', 3/8'' |
AP/SL |
Single stage |
Sub-atmospheric pressure |
316L SS |
Face seal |
1/4'', 3/8'' |
AP |
Two stage |
Source |
316L SS |
Face seal |
1/4'',3/8'' |
AZ |
Single stage |
Distribution |
316L SS |
Face seal |
1/4'', 3/8'' |
AZ |
Single stage |
Source |
316L SS |
Face seal |
1/4'', 3/8'' |
AZ |
Single stage |
Sub-atmospheric pressure |
316L SS |
Face seal |
1/4'', 3/8'' |
The gripper function and the rotation function have been integrated in acompact package.Possible to grip and reverse the workpiece in conveyor lines with a singleunit.Rotation range and angle adjustable.
SUMMARY
The robot hand tools change automatically to accommodate workpiecesof different shapes, thus making it possible to adopt the FMS (flexiblemanufacturing system) in the assembly line.
Series
Positioning |
Action |
|
MA210 |
Ball coupling |
Single acting |
MA310 |
Ball coupling |
Single acting |
MA311 |
Ball coupling |
Double acting |
MA320 |
Curved coupling |
Single acting |
MA321 |
Curved coupling |
Double acting |
Air Gripper 2-Finger Type, Vertically compact, lightweight due to the wedge shaped cam construction.Ideal for operations which external force is applied to, such as pressfitting operations.Repeatability: 0.01 mm